$CM_FORMAT JEOL/EO
$CM_VERSION 1.00
$CM_COMMENT CRS_FSA_UIZ
$CM_DATE 2023-01-09
$CM_TIME 15:01:51
$CM_OPERATOR General
$CM_INSTRUMENT InTouchScope
$CM_ACCEL_VOLT 10
$CM_MAG 1500
$CM_SIGNAL SED
$CM_STAGE_POS -5.803 6.089 10.004 0.000 0.000
$CM_STAGE_X -5.803
$CM_STAGE_Y 6.089
$CM_STAGE_T 0.000
$CM_STAGE_Z 10.004
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 10m
$$SM_FILM_NUMBER 3
$$SM_TITLE 
$$SM_WD 10
$$SM_SPOT_SIZE 17
$$SM_VACUUM 0
$$SM_PHOTO Marche
$$SM_MERGE 
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE HV
